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A brief review of the technological advancements of phase measuring deflectometry

Yongjia Xu,  Feng Gao,  Xiangqian Jiang

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Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
引用本文: Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
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Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
Citation: Yongjia Xu, Feng Gao, Xiangqian Jiang. A brief review of the technological advancements of phase measuring deflectometry[J]. PhotoniX. doi: 10.1186/s43074-020-00015-9
shu

A brief review of the technological advancements of phase measuring deflectometry

doi: 10.1186/s43074-020-00015-9
基金项目: 

The research is funded by the Engineering and Physical Sciences Research Council (EPSRC) of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology (Grand Ref:EP/I033424/1), and the EPSRC Future Advanced Metrology Hub (EP/P006930/1).

A brief review of the technological advancements of phase measuring deflectometry

  • EPSRC Future Metrology Hub, University of Huddersfield, Huddersfield, HD1 3DH, UK

Funds: 

The research is funded by the Engineering and Physical Sciences Research Council (EPSRC) of the UK with the funding of the EPSRC Centre for Innovative Manufacturing in Advanced Metrology (Grand Ref:EP/I033424/1), and the EPSRC Future Advanced Metrology Hub (EP/P006930/1).

    摘要
  • 摘要: This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.
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    Abstract: This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.
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    • 参考文献(73)
  • [1] Sherrington I, Smith E. The significance of surface topography in engineering. Precis Eng. 1986;8:79–87.
    [2] Gorthi S, Rastogi P. Fringe projection techniques: whither we are? Opt Lasers Eng. 2010;48:134–40.
    [3] Zhang S. Recent progresses on real-time 3D shape measurement using digital fringe projection techniques. Opt Lasers Eng. 2010;48:149–58.
    [4] Salvi J, Fernandez S, Pribanic T, Llado X. A state of the art in structured light patterns for surface profilometry. Pattern Recogn. 2010;43:2666–80.
    [5] Mériaudeau F, Rantoson R, Fofi D, Stolz C. Review and comparison of non-conventional imaging systems for three-dimensional digitization of transparent objects. J Electron Imaging. 2012;21:21105–1.
    [6] Chen F, Brown G, Song M. Overview of three-dimensional shape measurement using optical methods. Optim Eng. 2000;39:10–22.
    [7] Blais F. Review of 20 years of range sensor development. J Electron Imaging. 2004;13:231–40.
    [8] Wyant J. White light interferometry. Proc SPIE. 2002;4737:98–107.
    [9] Jiang X, Wang K, Gao F, Muhamedsalih H. Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. Appl Optics. 2010;49:2903–9.
    [10] Dávila A. Wavelength scanning interferometry using multiple light sources. Opt Express. 2016;24:5311–22.
    [11] Xue S, Chen S, Tie G. Near-null interferometry using an aspheric null lens generating a broad range of variable spherical aberration for flexible test of aspheres. Opt Express. 2018;26:31172–89.
    [12] Murphy P, Forbes G, Fleig J, Dumas P, Tricard M. Stitching interferometry: a flexible solution for surface metrology. Opt and Photonics. 2004;14(5):38–43.
    [13] Lee H, Kim S. Precision profile measurement of aspheric surfaces by improved Ronchi test. Optim Eng. 1999;38:1041–7.
    [14] Butel G, Smith G, Burge J. Binary pattern deflectometry. Appl Optics. 2014;53:923–30.
    [15] Kafri O, Glatt I. Moiré deflectometry: a ray deflection approach to optical testing. Optim Eng. 1985;24:944–60.
    [16] Servin M, Rodriguez-Vera R, Carpio M, Morales A. Automatic fringe detection algorithm used for moire deflectometry. Appl Optics. 1990;29:3266–70.
    [17] Wang B, Luo X, Pfeifer T, Mischo H. Moiré deflectometry based on Fourier-transform analysis. Measurement. 1999;25:245–53.
    [18] Legarda-Saenz R. Robust wavefront estimation using multiple directional derivatives in Moiré deflectometry. Opt Lasers Eng. 2007;45:915–21.
    [19] Schulz M, Ehret G, Fitzenreiter A. Scanning deflectometric form measurement avoiding path-dependent angle measurement errors. J Eur Opt Soc Rap Publ. 2010;5:10026.
    [20] Hao Q, Zhu Q, Wang Y. Deflectometer with synthetically generated reference circle for aspheric surface testing. Opt Laser Technol. 2005;37:375–80.
    [21] Amstel W, Bäumer S, Horijon J. Optical figure testing by scanning deflectometry. Proc SPIE. 1999;3739:283–90.
    [22] Miks A, Novak J, Novak P. Method for reconstruction of shape of specular surfaces using scanning beam deflectometry. Opt Lasers Eng. 2013;51:867–72.
    [23] Häusler G, Richter C, Leitz K, Knauer M. Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution. Opt Lett. 2008;33:396–8.
    [24] Liu Y, Lehtonen P, Su X. High-accuracy measurement for small scale specular objects based on PMD with illuminated film. Opt Lasers Eng. 2012;44(2):459–62.
    [25] Huang L, Ng CS, Asundi AK. Dynamic three-dimensional sensing for specular surface with monoscopic fringe reflectometry. Opt Express. 2011;19(13):12809–14.
    [26] Li W, Sandner M, Gesierich A, Burke J. Absolute optical surface measurement with deflectometry. Interferometry XVI: Appl. 2012;8494:84940G.
    [27] Bothe T, Li W, von Kopylow C, Juptner WP. High-resolution 3D shape measurement on specular surfaces by fringe reflection. Opt Metrology Prod Eng. 2004;5457:411–22.
    [28] Su, P.; Parks, R.; Angel, R.; Wang, L.; Burge, J. A new test for optical surfaces. SPIE Newsroom 2011, 20.
    [29] Xu X, Zhang X, Niu Z, Wang W, Zhu Y, Xu M. Self-calibration of in situ monoscopic deflectometric measurement in precision optical manufacturing. Opt Express. 2019;27(5):7523–36.
    [30] Xu X, Zhang X, Niu Z, Wang W, Xu M. Extra-detection-free monoscopic deflectometry for the in situ measurement of freeform specular surfaces. Opt Lett. 2019;44(17):4271–4.
    [31] Tang Y, Su X, Liu Y, Jing H. 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry. Opt Express. 2008;16:15090–6.
    [32] Petz M, Tutsch R. Measurement of optically effective surfaces by imaging of gratings. Opt Meas Syst Indust Inspect III. 2003;5144:288–94.
    [33] Petz M, Ritter R. Reflection grating method for 3D measurement of reflecting surfaces. Opt Meas Syst Industr Inspect II: Appl Production Eng. 2001;4399:35–41.
    [34] Guo H, Feng P, Tao T. Specular surface measurement by using least squares light tracking technique. Opt Lasers Eng. 2010;48(2):166–71.
    [35] Xiao Y, Su X, Chen W, Liu Y. Three-dimensional shape measurement of aspheric mirrors with fringe reflection photogrammetry. Appl Optics. 2012;51(4):457–64.
    [36] Li C, Li Y, Xiao Y, Zhang X, Tu D. Phase measurement deflectometry with refraction model and its calibration. Opt Express. 2018;26(26):33510–22.
    [37] Zhang Z, Liu Y, Huang S, Niu Z, Guo J, Gao N, et al. Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship. Proc SPIE. 2016;10023:100230X.
    [38] Zhao P, Gao N, Zhang Z, Gao F, Jiang X. Performance analysis and evaluation of direct phase measuring deflectometry. Opt Lasers Eng. 2018;103:1339–51.
    [39] Liu Y, Huang S, Zhang Z, Gao N, Gao F, Jiang X. Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry. Sci Rep. 2017;7(1):10293.
    [40] Knauer M, Kaminski J, Hausler G. Phase measuring deflectometry: a new approach to measure specular free-form surfaces. Proc SPIE. 2004;5457:366–76.
    [41] Ren H, Gao F, Jiang X. Iterative optimization calibration method for stereo deflectometry. Opt Express. 2015;23:22060–8.
    [42] Xu Y, Gao F, Zhang Z, Jiang X. A holistic calibration method with iterative distortion compensation for stereo deflectometry. Opt Lasers Eng. 2018;106:111–8.
    [43] Towers CE, Towers DP, Jones JDC. Absolute fringe order calculation using optimised multi-frequency selection in full-field profilometry. Opt Lasers Eng. 2005;43(7):788–800.
    [44] Zhang Z, Towers CE, Towers DP. Time efficient color fringe projection system for 3D shape and color using optimum 3-frequency selection. Opt Express. 2006;14(14):6444–55.
    [45] Häusler G, Faber C, Olesch E, Ettl S. Deflectometry vs. interferometry. Opt Meas Syst Indust Inspect VIII, Int Soc Opt Photonics. 2013;8788:87881C.
    [46] Niu Z, Xu X, Zhang X, Wang W, Zhu Y, Ye J, et al. Efficient phase retrieval of two-directional phase-shifting fringe patterns using geometric constraints of deflectometry. Opt Express. 2019;27(6):8195–207.
    [47] Ren H, Gao F, Jiang X. Improvement of high-order least-squares integration method for stereo deflectometry. Appl Optics. 2015;54:10249–55.
    [48] Xu Y, Gao F, Jiang X. Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis. Opt Lasers Eng. 2018;111:1–7.
    [49] Xu Y, Gao F, Jiang X. Performance analysis and evaluation of geometric parameters in stereo Deflectometry. Engineering. 2018;4(6):806–15.
    [50] Höfer S, Burke J, Heizmann M. Infrared deflectometry for the inspection of diffusely specular surfaces. Adv Opt Technol. 2016;5(5–6):377–87.
    [51] Li C, Zhang X, Tu D. Posed relationship calibration with parallel mirror reflection for stereo deflectometry. Optim Eng. 2018;57(3):034103.
    [52] Petz M, Fischer FM, Tutsch R. Systematic errors in deflectometry induced by use of liquid crystal displays as reference structure. In: Proc. 21st IMEKO TC2 symposium on photonics in measurement; 2013. p. 16–8.
    [53] Huang L, Idir M, Zuo C, Asundi A. Review of phase measuring deflectometry. Opt Lasers Eng. 2018;107:247–57.
    [54] Zhang Z, Wang Y, Huang S, Liu Y, Chang C, Gao F, et al. Three-dimensional shape measurements of specular objects using phase-measuring deflectometry. Sensors. 2017;17(12):2835.
    [55] Zhang Z. A flexible new technique for camera calibration. In: IEEE Transactions on Pattern Analysis and Machine Intelligence. 2000;22(11):1330-34. https://doi.org/10.1109/34.888718.
    [56] Zuo C, Chen Q, Gu G, Feng S, Feng F, Li R, et al. High-speed three-dimensional shape measurement for dynamic scenes using bi-frequency tripolar pulse-width-modulation fringe projection. Opt Lasers Eng. 2013;51(8):953–60.
    [57] Huang L, Zhang Q, Asundi A. Camera calibration with active phase target: improvement on feature detection and optimization. Opt Lett. 2013;38(9):1446–8.
    [58] Schmalz C, Forster F, Angelopoulou E. Camera calibration: active versus passive targets. Optim Eng. 2011;50(11):113601.
    [59] Xu Y, Gao F, Ren H, Jiang X. An iterative distortion compensation algorithm for camera calibration based on phase target. Sensors. 2017;17(6):1188.
    [60] Huang L, Xue J, Gao B, Mcpherson C, Beverage J, Idir M. Modal phase measuring deflectometry. Opt Express. 2016;24:24649–64.
    [61] Breitbarth M, Kühmstedt P, Notni G. Calibration of a combined system with phase measuring deflectometry and fringe projection. Opt Meas Syst Industr Inspect VI. 2009;7389:738909.
    [62] Xiao Y, Su X, You Z. Pose transfer geometrical calibration for fringe-reflection optical three-dimensional measurement. Opt Commun. 2013;305:143–6.
    [63] Soumelidis A, Fazekas Z, Bodis-Szomoru A, Schipp F, Csakany B, Nemeth J. Specular surface reconstruction method for multi-camera corneal topographer arrangements. In: Recent advances in biomedical engineering; 2009. p. 639–60.
    [64] Olesch E, Faber C, Hausler G. Deflectometric self-calibration for arbitrary specular surfaces. DGaO proceedings; 2011.
    [65] Huang L, Xue J, Gao B, Zuo C, Idir M. Spline based least squares integration for two-dimensional shape or wavefront reconstruction. Opt Lasers Eng. 2017;91:221–6.
    [66] Li M, Li D, Jin C, Kewei E, Yuan X, Xiong Z, et al. Improved zonal integration method for high accurate surface reconstruction in quantitative deflectometry. Appl Optics. 2017;56(13):144–51.
    [67] Huang L, Idir M, Zuo C, Kaznatcheev K, Zhou L, Asundi A. Comparison of two-dimensional integration methods for shape reconstruction from gradient data. Opt Lasers Eng. 2015;64:1–11.
    [68] Flores JL, Legarda-Saenz R, Garcia-Torales G. Color deflectometry for phase retrieval using phase-shifting methods. Opt Commun. 2015;334:298–302.
    [69] Graves LR, Quach H, Choi H, Kim DW. Infinite deflectometry enabling 2π-steradian measurement range. Opt Express. 2019;27(5):7602–15.
    [70] Carvalho MJ, Veiga CL, Albertazzi A. Defectometry in cylindrical coordinates using a conical mirror: principles and proof of concept. J Braz Soc Mech Sci & Eng. 2019;41(9):380.
    [71] Butel GP, Smith GA, Burge JH. Deflectometry using portable devices. Optim Eng. 2015;54(2):025111.
    [72] Willomitzer F, Yeh CK, Gupta V, Spies W, Schiffers F, Walton M, et al. Uncalibrated Deflectometry with a Mobile device on extended specular surfaces. arXiv preprint arXiv. 2019;1907:10700.
    [73] Boccardi F, Heath RW, Lozano A, Marzetta TL, Popovski P. Five disruptive technology directions for 5G. IEEE Commun Mag. 2014;52(2):74–80.
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出版历程
  • 收稿日期:  2020-03-10
  • 录用日期:  2020-05-29
  • 网络出版日期:  2020-06-05

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