3 Ming Hsieh Department of Electrical Engineering-Electrophysics, University of Southern California, Los Angeles, CA 90089, USA;
4 Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems, Harbin Institute of Technology, Shenzhen 518055, China;
5 Department of Electrical Engineering, City University of Hong Kong, Hong Kong SAR 999077, China;
6 The State Key Laboratory of Terahertz and Millimeter Waves, City University of Hong Kong, Hong Kong SAR 999077, China
Funds:
Shenzhen Municipal Basic Research (Key Project) (JCY20241202123919027)
CityU11310522
Science, Technology and Innovation Commission of Shenzhen Municipality (WDZC20220818100259004)
City University of Hong Kong [Project No. 9610628].
the National Natural Science Foundation of China (Nos. 62305184)
The National Key R&D Program of China (Grant Nos. 2022YFA1404700)
the Research Grants Council of the Hong Kong Special Administrative Region, China [Project No. C5031-22G
the Major Key Project of PCL (PCL2024A01)
Basic and Applied Basic Research Foundation of Guangdong Province (2023A1515012932)
Augmented reality (AR) displays have gained significant attention for their ability to blend the real and virtual worlds seamlessly. However, they face challenges like the vergence-accommodation conflict and a limited eyebox. The AR community is actively seeking lightweight, integrative optical elements to overcome these limitations. In this study, we demonstrate a three-dimensional varifocal meta-device for AR display. The meta-device is composed of three cascaded metasurfaces with Moiré and off-center Fresnel lens phase profiles designed to dynamically manipulate the focus point in three-dimensional space. The cascaded metasurfaces are designed and fabricated by the TiO2 nanopillars with varying diameters, which are polarizationinsensitive for light field manipulation. The focal point position is precisely controlled by the relative rotation between the metasurfaces. The meta-device achieves an effective focal length ranging from 3.7 mm to 33.2 mm and can adjust the lateral focal point within the same range. The dynamic eyebox size varies from 4.2 mm to 5.8 mm. This lightweight, integrated meta-device is well-suited for various imaging applications, including AR displays, as it simultaneously addresses the vergence-accommodation conflict and expands the eyebox.