Producing focused extreme ultraviolet vortex with Fermat‑spiral photon sieves

1.
Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Qinghe Road, 201800, Shanghai, China
2.
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Xidazhi Road, 150001, Harbin, China
3.
School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Jungong Road, 200093, Shanghai, China
4.
Zhangjiang Laboratory, 100, Haike Road, 201204, Shanghai, China
5.
Westlake Institute for Optoelectronics, 311421, Fuyang, Hangzhou, China

Funds: Q.Z.acknowledges support by the Key Project of Westlake Institute for Optoelectronics (Grant No. 2023GD007).

摘要

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Abstract:
Extreme ultraviolet (EUV) light is difficult to focus due to strong absorption of most materials. Photon sieves (PS), rather than Fresnel zone plates (FZP), can focus EUV to smaller spot and suppress the higher orders of secondary maxima by several orders of magnitude. The number of pinholes used in PS is far more than that of transparent rings used in FZP, providing a great flexibility to manipulate structured focusing in EUV. In this work we investigate the Fermat-spiral PS to produce focused vortices with different topological charges. Experiment at the wavelength of 46.9 nm is carried out and multi-planar coherent diffractive imaging is used to retrieve the phase map of the focused EUV vortices. These results show the enormous potential of PS for manipulating EUV light. This study not only provides a compact, affordable substitute to focusing vortices where transmissive optics materials are unavailable, but also provides a route of converting various complex light manipulation ranging from visible light to EUV and soft x-ray.

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