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主办单位：
中国光学工程学会清华大学上海理工大学
名誉主编： 庄松林院士
国际主编： 顾敏院士
主编：
孙洪波教授仇旻教授
创刊：2020年3月
ISSN：2662-1991

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Seungjai Won, Jungyoon Kim, Yungeun Oh, Taewon Kim, Seungman Choi, Byunggi Kim, Hongki Yoo, Seung-Woo Kim, Young-Jin Kim

doi: 10.1186/s43074-025-00206-2

Abstract(0) PDF(0)

Abstract:
The continued narrowing of transistor pitch in semiconductor chips has boosted the demand for deep-ultraviolet (DUV, λ < 280 nm)-based high-resolution optical inspection and metrology. However, the lack of a beam control device for DUV wavelength due to the significant UV absorption in most optical materials has hindered the handy implementation of conventional high-resolution metrology techniques such as structured illumination microscopy (SIM) to the DUV regime. Here, we present a programmable DUV structured illumination for nanometer-resolution pitch and displacement inspection of periodic samples enabled by nonlinear third-harmonic generation. By manipulating a spatial phase of the near-infrared (NIR, λ = 800 nm) driving beam that is incident on crystalline solids, the emitted third harmonic beam at DUV (λ = 266 nm) can be spatially controlled so as to form a high-visibility sinusoidal distribution with a real-time adjustable pitch and orientation angle. The angle-tunable DUV structured beam allows observation of low-visibility periodic sample information in high-visibility frequency-down-converted Moiré patterns, with a magnification factor of up to 70 times. By analyzing the Moiré pattern pitch and orientation angle, the sample periods of 277.8 nm and 416.7 nm were reconstructed with an error of 1.9% (5.4 nm) and 0.5% (2.1 nm), respectively. Furthermore, a 20.0 nm lateral shift of the periodic sample – below Abbe’s diffraction limit – was measured with a repeatability of 5.3 nm via monitoring of the magnified Moiré pattern. Our DUV structured illumination will enable high-resolution monitoring of semiconductor processes such as transistor pitch variation and mask alignment.

Sub-nanosecond heat-based logic, writing and reset in an antiferromagnetic magnetoresistive memory

M. Surýnek, A. Farkaš, J. Zubáč, P. Kubaščík, K. Olejník, F. Krizek, L. Nádvorník, T. Ostatnický, R. P. Campion, V. Novák, T. Jungwirth, P. Němec

doi: 10.1186/s43074-025-00207-1

Abstract(10) PDF(0)

Abstract:
Thermal logic aims to create thermal counterparts to electronic circuits. In this work, we investigate experimentally the response of an analog memory device based on a thin film of an antiferromagnetic metal CuMnAs to bursts of heat pulses generated by the absorption of femtosecond laser pulses at room ambient temperature. When a threshold temperature in the heat-based short-term memory of the device is exceeded, the output of the in-memory logic operations is transferred within the same device to a long-term memory, where it can be retrieved at macroscopic times. The long-term memory is based on magnetoresistive switching from a reference low-resistive uniform magnetic state to high-resistive metastable nanofragmented magnetic states. The in-memory heat-based logic operations and the conversion of the outputs into the electrically-readable long-term magnetoresistive memory were performed at sub-nanosecond time scales, making them compatible with the GHz frequencies of standard electronics. Finally, we demonstrate the possibility of rapidly resetting the long-term memory to the reference low-resistive state by heat pulses.

Photonic transformer chip: interference is all you need

Ye Tian, Shuiying Xiang, Xingxing Guo, Yahui Zhang, Jiashang Xu, Shangxuan Shi, Haowen Zhao, Yizhi Wang, Xinran Niu, Wenzhuo Liu, Yue Hao

doi: 10.1186/s43074-025-00182-7

Abstract(17) PDF(1)

Abstract:
As the core component of the transformer model, the attention has been proved as all you need in artificial intelligence field in recent years. However, conventional electronic processors are unable to cope with the exponentially increasing hardware costs and energy consumption of the computing-expensive attention. While the photonic neural network (NN) chips provide alternative energy-efficient solutions for accelerating the matrix multiplication (MM), existing photonic accelerators are primarily designed for weight-static NNs that involve MM between the learned weight matrix and input tensors and thus are inefficient in supporting attention mechanisms that require dynamic input operands. Here we propose an attention mechanism relying solely on the runtime-programable optical-interference. Through theoretical analyses, numerical simulations and experimental validations, we demonstrate the photonic “all-interference” attention with learning capability equivalent to classical self-attention, and implement the photonic transformer chip (PTC). Evaluation shows that the PTC is promising to exceed 200 pera-operations per second (POPS) with 1POPS/mm² computation density and 0.5 POPS/W power efficiency, much better than prior photonic accelerators, and delivers over 200 × energy reduction and 2 to 3 orders of magnitude higher computation capability compared to the electronic counterpart. The photonic transformer with “all-interference” attention proposed in this work highlights the immense potential of photonics to construct its own computing paradigm for general purpose machine learning.

Hybrid high-index composite meta-structures with atomic layer-coated nanoparticle-embedded resin

Minseok Choi, Hyunjung Kang, Dohyun Kang, Joohoon Kim, Hongyoon Kim, Junhwa Seong, Seokwoo Kim, Junsuk Rho

doi: 10.1186/s43074-025-00204-4

Abstract(14) PDF(0)

Abstract:
Metasurfaces offer great potential to replace conventional optics by enabling multi-functionalities in compact form factors. However, their mass production remains at crossroads, as most materials compatible with scalable fabrication like nanoimprint lithography (NIL) exhibit relatively low refractive indices (~ 2), which limit metasurface performance and necessitate tall, high-aspect-ratio meta-atoms prone to bending and collapsing. To address these bottlenecks, we introduce a hybrid nanoparticle-embedded resin (nano-PER) structure that reduces meta-atom height and aspect ratio. By utilizing TiO₂ nano-PER as the core material with thin TiO₂ coatings, we can implement the optical properties of high refractive index with printable material, achieving a height reduction of over 27% and an aspect ratio reduction of more than 36% compared with conventional hybrid structures using nanoimprint resin. Despite the reduced dimensions, our meta-atoms exhibit high broadband properties, with an average conversion efficiency of over 72% across blue (450 nm), green (532 nm), and red (635 nm) wavelengths. Our design provides robustness in the fabrication process, demonstrated by producing a hyperbolic metalens via NIL and experimentally verifying its optical performance, with an average focusing efficiency of 51.23%. These findings mark an important advancement in scalable, high-performance metasurfaces, paving the way for their practical integration into optical applications.

引用排行

Terahertz spectroscopy in biomedical field: a review on signal-to-noise ratio improvement

Yan Peng, Chenjun Shi, Yiming Zhu, Min Gu, Songlin Zhuang

2020, 1(1). doi: 10.1186/s43074-020-00011-z

PDF(41)

Recent advances in multi-dimensional metasurfaces holographic technologies

Ruizhe Zhao, Lingling Huang, Yongtian Wang

2020, 1(1). doi: 10.1186/s43074-020-00020-y

PDF(70)

Information Metamaterials: bridging the physical world and digital world

Qian Ma, Tie Jun Cui

2020, 1(1). doi: 10.1186/s43074-020-00006-w

PDF(68)

Vacuum-ultraviolet photodetectors

Lemin Jia, Wei Zheng, Feng Huang

2020, 1(1). doi: 10.1186/s43074-020-00022-w

PDF(39)

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